The Nano Positioning Book: Moving and Measuring to Better than a Nanometre
T. R. Hicks, P. D. Atherton
Because the existing terms used in specifying nano precision mechanisms (accuracy, precision, linearity) are subject to ambiguous international standards, this book defines and clarifies the terms in a full glossary and includes general descriptions of the core technologies involved.
Categories:
Year:
1997
Publisher:
ISTE Publishing Company
Language:
english
Pages:
128
ISBN 10:
0953065804
ISBN 13:
9780953065806
File:
PDF, 9.09 MB
IPFS:
,
english, 1997