Electroceramic-based MEMS: fabrication-technology and applications
Nava SetterThe book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.
Categories:
Year:
2005
Edition:
1
Publisher:
Springer
Language:
english
Pages:
415
ISBN 10:
0387233105
ISBN 13:
9780387233109
Series:
Electronic Materials: Science & Technology
File:
PDF, 8.22 MB
IPFS:
,
english, 2005