Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

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Engineering - Industrial Engineering & Materials Science
Ultra-Clean Technology Handbook: Volume...

Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

Name: Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water
ISBN: 9781351406437

Ohmi (Author)

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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

Categories:

Engineering - Industrial Engineering & Materials Science

Year:

1993

Edition:

Publisher:

CRC Press

Language:

english

ISBN 10:

0824787536

ISBN 13: