PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing
Ronald A. Powell and Stephen M. Rossnagel (Eds.)Categories:
Year:
1999
Publisher:
Academic Press, Elsevier
Language:
english
Pages:
1
ISBN 10:
012533026X
ISBN 13:
9780125330268
Series:
Thin Films 26
File:
PDF, 24.07 MB
IPFS:
,
english, 1999