X-ray metrology in semiconductor manufacturing

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Engineering
X-ray metrology in semiconductor...

X-ray metrology in semiconductor manufacturing

Name: X-ray metrology in semiconductor manufacturing
ISBN: 9781420005653

D. Keith Bowen, Brian K. Tanner

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Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and repeatability, absolute accuracy, spot size, and throughput for each type of measurement. This text contains important information for electrical engineers, fabrication engineers, and semiconductor engineers.

Categories:

Engineering

Year:

2006

Edition:

Publisher:

CRC/Taylor & Francis

Language:

english

Pages:

273

ISBN 10: